Measurement error of a coupled AFM probe-elastic membrane system

DOI10.1155/2018/2789684MaRDI QIDQ1720654zbMATH OpenOpenAlexWikidataFDO

Authors Shueei-Muh Lin, Che-Lun Tsai, Hung-Chang Lee

Publication date 8 February 2019

Published in Mathematical Problems in Engineering (Search for Journal in Brave)

Copyright license Creative Commons Attribution 4.0 International

Full work available at URL https://doi.org/10.1155/2018/2789684

Mathematics Subject Classification ID

Membranes (74K15)

Review text

Summary: The characteristic of an AFM probe scanning the topography on an elastic substrate is investigated. It is different to the conventional rigid substrate. The analytical solution of the novel system is presented. For an elastic substrate the errors of frequency shift determined by using the force gradient methods and the perturbation method are satisfactory only for larger tip-surface distances. The smaller the interacting distance is, the larger the measurement error due to the amplitude of membrane is.

Recommendations

• Design of harmonic AFM probe subjected to van der Waals force in the modified couple stress theory
• Analytical solutions of the frequency shifts of several modes in AFM scanning an inclined surface, subjected to the Lennard-Jones force
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• Frequency shifts and analysis of AFM accompanying with coupled flexural-torsional motions
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Cites work

• Analytical solutions of the frequency shifts of several modes in AFM scanning an inclined surface, subjected to the Lennard-Jones force
• Frequency shifts and analysis of AFM accompanying with coupled flexural-torsional motions
• scientific article; zbMATH DE number 3463279 (Why is no real title available?)

Cited in

(4)

• Impact of features of control systems of the tunneling microscope on the measurement accuracy
• Analytical solutions of the frequency shifts of several modes in AFM scanning an inclined surface, subjected to the Lennard-Jones force
• Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon
• The effect of vibrations of the base of a tunnel microscope on the deviation of the program motion of a probe

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