Measurement error of a coupled AFM probe-elastic membrane system

DOI10.1155/2018/2789684MaRDI QIDQ1720654zbMATH OpenOpenAlexWikidataFDO

Authors Shueei-Muh Lin, Che-Lun Tsai, Hung-Chang Lee

Publication date 8 February 2019

Published in Mathematical Problems in Engineering (Search for Journal in Brave)

Copyright license Creative Commons Attribution 4.0 International

Full work available at URL https://doi.org/10.1155/2018/2789684

Mathematics Subject Classification ID

Membranes (74K15)

Recommendations

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Cites work

• scientific article; zbMATH DE number 3463279 (Why is no real title available?)
• Analytical solutions of the frequency shifts of several modes in AFM scanning an inclined surface, subjected to the Lennard-Jones force
• Frequency shifts and analysis of AFM accompanying with coupled flexural-torsional motions

Cited in

(4)

• Impact of features of control systems of the tunneling microscope on the measurement accuracy
• The effect of vibrations of the base of a tunnel microscope on the deviation of the program motion of a probe
• Analytical solutions of the frequency shifts of several modes in AFM scanning an inclined surface, subjected to the Lennard-Jones force
• Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon

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