Mixing macro and micro flowtime estimation model: Wafer fab example

DOI10.1080/002075499190608MaRDI QIDQ4497068zbMATH OpenOpenAlexFDO

Authors T. Y. Tseng, T.-F. Ho, Rong-Kwei Li

Publication date 21 August 2000

Published in International Journal of Production Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/002075499190608

Mathematics Subject Classification ID

Production models (90B30)

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(5)

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• Investigation of flow mechanisms in semiconductor wafer fabrication
• Heuristic dispatching rule to maximize TDD and IDD performance

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