Gordon Moore and his law: numerical methods to the rescue

MaRDI QIDQ1946038zbMATH OpenFDO

Authors Raúl Rojas

Publication date 17 April 2013

Published in Documenta Mathematica (Search for Journal in Brave)

Full work available at URL http://www.emis.de/journals/DMJDMV/vol-ismp/52_rojas-raul.html

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zbMATH Keywords

Fourier opticsMoore's lawnumerical simulationphotolithography

Mathematics Subject Classification ID

General applied mathematics (00A69) History of mathematics in the 21st century (01A61) History of optics and electromagnetic theory (78-03) History of statistical mechanics (82-03)

Review text

Summary: In this chapter we review the protracted history of ``Moore's Law, that is, the expected doubling of the number of transistors in semiconductor chips every 18 months. Such an exponential increase has been possible due to steady improvements in optical imaging methods. The wavelength of light used for photolithography has been reduced every decade, but it is reaching tough limits. Mathematical methods capable of simulating optical systems and their interference properties play now a significant role in semiconductor design and have kept Moore's Law alive for at least the last ten years. As we show, advances in semiconductor integration and numerical optimization methods act synergistically.

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(2)

• Application of optical proximity correction technology
• The Moore's law for photonic integrated circuits

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