Application of optical proximity correction technology

DOI10.1007/S11432-008-0006-4MaRDI QIDQ2481784zbMATH OpenOpenAlexFDO

Authors Yici Cai, Qiang Zhou, Rui Shi, Yang Wang, Xianlong Hong

Publication date 15 April 2008

Published in Science in China. Series F (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11432-008-0006-4

zbMATH Keywords

IClayoutmodel-basedoptical proximity effects (OPC)rules-based

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55)

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Cites work

• The concept of partial coherence in optics

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