On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate
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Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Dynamical bifurcation of solutions to dynamical problems in solid mechanics (74H60) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Plates (74K20) Micromechanics of solids (74M25)
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Cites work
Cited in
(7)- Dynamics of sensing element of micro- and nano-electromechanical sensors as anisotropic size-dependent plate
- Nonlinearity reduction in MEMS resonators based on design of H-shaped beams
- A novel technique for mass detection of a piezoelectric cantilever using active bifurcations
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