On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate
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Publication:2234591
Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Plates (74K20) Micromechanics of solids (74M25) Dynamical bifurcation of solutions to dynamical problems in solid mechanics (74H60)
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Cites work
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