On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate

DOI10.1007/S00707-021-02984-9zbMATH Open1486.74046OpenAlexW3165538630MaRDI QIDQ2234591FDOQ2234591

Authors: M. Khater 

Publication date: 19 October 2021

Published in: Acta Mechanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00707-021-02984-9

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zbMATH Keywords

dynamic bifurcationfrequency-response equationadded mass effectbeam stiffness

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Plates (74K20) Micromechanics of solids (74M25) Dynamical bifurcation of solutions to dynamical problems in solid mechanics (74H60)

Cites Work

• Title not available (Why is that?)
• Nonlinear dynamics of a resonant gas sensor

Cited In (6)

• Geometrical and flow configurations for enhanced microcantilever detection within a fluidic cell
• Investigation of the enhancement of microelectromechanical capacitive pressure sensor performance using the genetic algorithm optimization technique
• A novel technique for mass detection of a piezoelectric cantilever using active bifurcations
• Dynamics of sensing element of micro- and nano-electromechanical sensors as anisotropic size-dependent plate
• Nonlinearity reduction in MEMS resonators based on design of H-shaped beams
• Micro-machined silicon accelerometer with piezoresistive SCR implementation for glucolysis

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