Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

DOI10.1007/S10483-015-2005-6MaRDI QIDQ259333zbMATH OpenOpenAlexFDO

Authors Junhua Zhu, Renhuai Liu

Publication date 11 March 2016

Published in AMM. Applied Mathematics and Mechanics. (English Edition) (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s10483-015-2005-6

zbMATH Keywords

sensitivity analysisanalytical solutionmodified couple stress theorypull-in voltageradio frequency (RF) micro electro-mechanical system (MEMS) switchstepped cantilever beam

Mathematics Subject Classification ID

Lasers, masers, optical bistability, nonlinear optics (78A60) Electromagnetic effects in solid mechanics (74F15) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Micromechanics of solids (74M25) Control, switches and devices (``smart materials) in solid mechanics (74M05)

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Cites work

• Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory
• Size effect on pull-in behavior of electrostatically actuated microbeams based on a modified couple stress theory
• Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations

Cited in

(4)

• On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate
• Impact dynamics of MEMS switches
• Axial control for nonlinear resonances of electrostatically actuated nanobeam with graphene sensor
• Unified nonlinear quasistatic and dynamic analysis of RF-MEMS switches

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