Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

DOI10.1007/S10483-015-2005-6zbMath1332.74042OpenAlexW2255030476MaRDI QIDQ259333

Junhua Zhu, Ren-huai Liu

Publication date: 11 March 2016

Published in: AMM. Applied Mathematics and Mechanics. (English Edition) (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10483-015-2005-6

zbMATH Keywords

analytical solutionsensitivity analysismodified couple stress theorypull-in voltageradio frequency (RF) micro electro-mechanical system (MEMS) switchstepped cantilever beam

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Control, switches and devices (``smart materials) in solid mechanics (74M05) Micromechanics of solids (74M25) Electromagnetic effects in solid mechanics (74F15) Lasers, masers, optical bistability, nonlinear optics (78A60)

Related Items (1)

Axial control for nonlinear resonances of electrostatically actuated nanobeam with graphene sensor

Cites Work

• Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory
• Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations
• Size effect on pull-in behavior of electrostatically actuated microbeams based on a modified couple stress theory

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