Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory
DOI10.1007/S10483-015-2005-6zbMATH Open1332.74042OpenAlexW2255030476MaRDI QIDQ259333FDOQ259333
Authors: Junhua Zhu, Renhuai Liu 
Publication date: 11 March 2016
Published in: AMM. Applied Mathematics and Mechanics. (English Edition) (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10483-015-2005-6
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sensitivity analysisanalytical solutionmodified couple stress theorypull-in voltageradio frequency (RF) micro electro-mechanical system (MEMS) switchstepped cantilever beam
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Cites Work
- Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations
- Size effect on pull-in behavior of electrostatically actuated microbeams based on a modified couple stress theory
- Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory
Cited In (4)
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