Unified nonlinear quasistatic and dynamic analysis of RF-MEMS switches

DOI10.1007/S00707-013-0831-4MaRDI QIDQ359442zbMATH OpenOpenAlexFDO

Authors Yingli Li, Daolin Xu, S. A. Meguid, Yi-Ming Fu

Publication date 12 August 2013

Published in Acta Mechanica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s00707-013-0831-4

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Micromechanics of solids (74M25) Control, switches and devices (``smart materials) in solid mechanics (74M05)

Recommendations

• Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis
• Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory
• Mathematical analyses of electrostatic MEMS switches
• Impact dynamics of MEMS switches
• Pull-in instability of geometrically nonlinear micro-switches under electrostatic and Casimir forces

Cites work

• A microstructure-dependent Timoshenko beam model based on a modified couple stress theory
• A novel atomistic approach to determine strain-gradient elasticity constants: tabulation and comparison for various metals, semiconductors, silica, polymers and the (ir)relevance for nanotechnologies
• Couple stress based strain gradient theory for elasticity
• Dynamic pull-in phenomenon in MEMS resonators
• Electromechanical dynamic buckling phenomenon in symmetric electric fields actuated microbeams considering material damping
• Non-local elastic plate theories

Cited in

(11)

• Nonlocal thermoelastic analysis of a functionally graded material microbeam
• Mixed Domain Macromodels for RF MEMS Capacitive Switches
• Analysis of micro-rotating disks based on the strain gradient elasticity
• Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory
• An analytical solution for thermoelastic damping in a micro-beam based on generalized theory of thermoelasticity and modified couple stress theory
• Analytical solution for nonlocal coupled thermoelasticity analysis in a heat-affected MEMS/NEMS beam resonator based on Green-Naghdi theory
• Impact dynamics of MEMS switches
• Transient thermoelastic response of a size‐dependent nanobeam under the fractional order thermoelasticity
• Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory
• Control of bouncing in MEMS switches using double electrodes
• Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

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