Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks

DOI10.1007/s10704-010-9531-4zbMath1282.74078OpenAlexW2059362217MaRDI QIDQ2439195

Alberto Corigliano, Barbara Simoni, Roberto Martini, Stefano Mariani, Aldo Ghisi

Publication date: 10 March 2014

Published in: International Journal of Fracture (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10704-010-9531-4

zbMATH Keywords

polycrystalsMEMSmulti-scale simulationsquasi-brittle fractureMonte Carlo methodology

Mathematics Subject Classification ID

Brittle fracture (74R10) Shocks and related discontinuities in solid mechanics (74J40) Crystalline structure (74E15) Stochastic and other probabilistic methods applied to problems in solid mechanics (74S60)

Related Items (3)

Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks ⋮ Fracture of solar-grade anisotropic polycrystalline silicon: a combined phase field-cohesive zone model approach ⋮ A stochastic multi-scale approach for the modeling of thermo-elastic damping in micro-resonators

Cites Work

• On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale
• Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon
• A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts
• Extended finite element simulation of quasi-brittle fracture in functionally graded materials
• Computational modelling of impact damage in brittle materials
• A finite element flux-corrected transport method for wave propagation in heterogeneous solids
• Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks
• Impact-induced composite delamination: state and parameter identification via joint and dual extended Kalman filters
• Fracture Toughness and Subcritical Crack Growth in Polycrystalline Silicon
• Finite-deformation irreversible cohesive elements for three-dimensional crack-propagation analysis
• Extended finite element method for quasi-brittle fracture
• A computational model of ceramic microstructures subjected to multiaxial dynamic loading

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