A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts

DOI10.1007/s11012-008-9111-0zbMath1163.74533OpenAlexW1993690342MaRDI QIDQ1027930

Stefano Mariani, Sarah Zerbini, Fabio Fachin, Alberto Corigliano, Aldo Ghisi, Fabrizio Cacchione

Publication date: 30 June 2009

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11012-008-9111-0

zbMATH Keywords

shocksmicro-mechanicsdrop impactsmulti-scale FE analysispolysilicon MEMS sensors

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05) Finite element methods applied to problems in solid mechanics (74S05)

Related Items (3)

A domain decomposition approach for the simulation of fracture phenomena in polycrystalline microsystems ⋮ Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks ⋮ Sensitivity, probabilistic and stochastic analysis of the thermo-piezoelectric phenomena in solids by the stochastic perturbation technique

Cites Work

• Extended finite element simulation of quasi-brittle fracture in functionally graded materials
• Computational modelling of impact damage in brittle materials
• Extended finite element method for quasi-brittle fracture

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