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Publication:2769339
zbMath1060.74001MaRDI QIDQ2769339
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Publication date: 5 February 2002
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distributed controlmicroelectromechanical systemstransport phenomenaelectromechanical miniaturization
General reference works (handbooks, dictionaries, bibliographies, etc.) pertaining to mechanics of deformable solids (74-00) General reference works (handbooks, dictionaries, bibliographies, etc.) pertaining to fluid mechanics (76-00)
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