Dynamic analysis of multilayers based MEMS resonators

DOI10.1155/2017/1262650MaRDI QIDQ1992306zbMATH OpenOpenAlexWikidataFDO

Authors Hassen M. Ouakad, Abdulrahman M. Alofi, A. H. Nayfeh

Publication date 5 November 2018

Published in Mathematical Problems in Engineering (Search for Journal in Brave)

Copyright license Creative Commons Attribution 4.0 International

Full work available at URL https://doi.org/10.1155/2017/1262650

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Vibrations in dynamical problems in solid mechanics (74H45)

Review text

Summary: The dynamic behavior of a microelectromechanical system (MEMS) parallel and electrically coupled double-layers (microbeams) based resonator is investigated. Two numerical methods were used to solve the dynamical problem: the reduced-order modeling (ROM) and the perturbation method. The ROM was derived using the so-called Galerkin expansion with considering the linear undamped mode shapes of straight beam as the basis functions. The perturbation method was generated using the method of multiple scales by direct attack of the equations of motion. Dynamic analyses, assuming the above two numerical methods were performed, and a comparison of the results showed good agreement. Finally, a parametric study was performed using the perturbation on different parameters and the results revealed different interesting features, which hopefully can be useful for some MEMS based applications.

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Cited in

(11)

• Multimode analysis of the dynamics and integrity of electrically actuated MEMS resonators
• Nonlinearity reduction in MEMS resonators based on design of H-shaped beams
• A quadratic interpolation-based variational Bayesian algorithm for measurement information lost in underwater navigation
• Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies
• A stochastic computational multiscale approach; application to MEMS resonators
• A continuum-based modeling of MEMS devices for estimating their resonant frequencies
• Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators
• Study of the mathematical model for a microelectromechanical resonator of the pPlatform type
• Analysis of uncertainties in MEMS and their influence on dynamic properties
• Parametric resonance and Hopf bifurcation analysis for a MEMS resonator
• Dynamics of size-dependent multilayered shear deformable microbeams with axially functionally graded core and non-uniform mass supported by an intermediate elastic support

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