Numerical simulation and design of a new microwave annular waveguide plasma source. I: Simulations without the plasma parameters
DOI10.1002/JNM.797zbMATH Open1245.78006OpenAlexW1999543528MaRDI QIDQ2889644FDOQ2889644
Authors: Fan Liu, Songyuan Dai, Jianhua Wang 
Publication date: 8 June 2012
Published in: International Journal of Numerical Modelling (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1002/jnm.797
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