Study the effect of CO₂ laser annealing on silicon nanostructures

DOI10.5539/MAS.V4N12P56MaRDI QIDQ3070516zbMATH OpenOpenAlexFDO

Authors Ali L. Abed, Bassam G. Rasheed

Publication date 3 February 2011

Published in Modern Applied Science (Search for Journal in Brave)

Copyright license Creative Commons Attribution 4.0 International

Full work available at URL http://www.ccsenet.org/journal/index.php/mas/article/view/8434

zbMATH Keywords

laser ablationlaser annealingsilicon nanostructures

Mathematics Subject Classification ID

Lasers, masers, optical bistability, nonlinear optics (78A60) Statistical mechanics of nanostructures and nanoparticles (82D80)

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