Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory

DOI10.1007/s10409-015-0550-2zbMath1348.76096OpenAlexW2263601825WikidataQ58483177 ScholiaQ58483177MaRDI QIDQ332874

Rasoul Shabani, Sahra Azma, Elnaz Alizadeh-Haghighi, Ghader Rezazadeh

Publication date: 9 November 2016

Published in: Acta Mechanica Sinica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10409-015-0550-2

zbMATH Keywords

Galerkin methodmicro-polar theorymicro-electro-mechanical systems (MEMS)micro-resonatorviscous fluid damping

Mathematics Subject Classification ID

Flows in porous media; filtration; seepage (76S05) Finite element methods applied to problems in fluid mechanics (76M10)

Cites Work

• Unnamed Item
• Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators
• Laminar flow of micropolar fluid in rectangular microchannels
• Self-similar solution of incompressible micropolar boundary layer flow over a semi-infinite plate
• Microchannels flow modelling with the micropolar fluid theory
• Simple microfluids
• Theory of thermomicrofluids
• Microcontinuum fluid mechanics - a review

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