Homogeneous and heterogeneous models for silicon oxidation

zbMATH Open1145.80308MaRDI QIDQ3528619FDOQ3528619

Authors: J. R. King 

Publication date: 17 October 2008

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Mathematics Subject Classification ID

Chemical kinetics in thermodynamics and heat transfer (80A30) Classical flows, reactions, etc. in chemistry (92E20)

Cited In (5)

• Construction of an Asymptotic Model for the Oxidation Process of Silicon
• On modelling thermal oxidation of Silicon II: numerical aspects
• On the Derivation of Heterogeneous Reaction Kinetics from a Homogeneous Reaction Model
• Recent advances in models for thermal oxidation of silicon
• Title not available (Why is that?)

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