Homogeneous and heterogeneous models for silicon oxidation

MaRDI QIDQ3528619zbMATH OpenFDO

Authors J. R. King

Publication date 17 October 2008

Mathematics Subject Classification ID

Chemical kinetics in thermodynamics and heat transfer (80A30) Classical flows, reactions, etc. in chemistry (92E20)

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• On the Derivation of Heterogeneous Reaction Kinetics from a Homogeneous Reaction Model
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(5)

• Construction of an Asymptotic Model for the Oxidation Process of Silicon
• On modelling thermal oxidation of Silicon II: numerical aspects
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• Recent advances in models for thermal oxidation of silicon
• scientific article; zbMATH DE number 2021806 (Why is no real title available?)

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