The Isolation Oxidation of Silicon

DOI10.1137/0149016MaRDI QIDQ3818028zbMATH OpenOpenAlexFDO

Authors J. R. King

Publication date 1989

Published in SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1137/0149016

zbMATH Keywords

a Newtonian fluidintegrated circuitsisolation oxidationmoving boundariesreaction controlled oxidationsilicon

Mathematics Subject Classification ID

Asymptotic expansions of solutions to PDEs (35C20) Stokes and related (Oseen, etc.) flows (76D07) Diffusion (76R50)

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(14)

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• Oxidation-induced stresses in the isolation oxidation of silicon
• Group classification, reductions and exact solutions of a class of higher order nonlinear degenerate parabolic equation
• H^1-solutions for the Hele-Shaw equation
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• Homogeneous and heterogeneous models for silicon oxidation
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• Stress-dependent local oxidation of silicon
• Fluttering-induced flow in a closed chamber
• The modified lubrication equation
• On a degenerate high-order parabolic equation for the evolution of elastic plates
• Higher order nonlinear degenerate parabolic equations

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