The Isolation Oxidation of Silicon: The Reaction-Controlled Case

DOI10.1137/0149064MaRDI QIDQ3826286zbMATH OpenOpenAlexFDO

Authors J. R. King

Publication date 1989

Published in SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1137/0149064

zbMATH Keywords

asymptotic expansionslimit of reaction-controlled oxidationnondimensional reaction coefficienttwo-dimensional isolation oxidation of silicon

Mathematics Subject Classification ID

Asymptotic expansions of solutions to PDEs (35C20) Stokes and related (Oseen, etc.) flows (76D07) Diffusion (76R50)

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Cited in

(27)

• Integral results for nonlinear diffusion equations
• Oxidation-induced stresses in the isolation oxidation of silicon
• Group classification and conservation laws of a sixth-order thin film type equation
• A review on rigorous derivation of reduced models for fluid-structure interaction systems
• Well-posedness and convergence of a numerical scheme for the corrected Derrida-Lebowitz-Speer-Spohn equation using the Hellinger distance
• H^1-solutions for the Hele-Shaw equation
• Rigorous derivation of a linear sixth-order thin-film equation as a reduced model for thin fluid-thin structure interaction problems
• A multidimensional nonlinear sixth-order quantum diffusion equation
• The Isolation Oxidation of Silicon
• Finite-length mask effects in the isolation oxidation of silicon
• Elastic-plated gravity currents
• Stress-dependent local oxidation of silicon
• On some nonlinear singular boundary value problems of higher order
• Force on a moving liquid blister
• Justification of a nonlinear sixth-order thin-film equation as the reduced model for a fluid–structure interaction problem
• Stable splitting of polyharmonic operators by generalized Stokes systems
• Group properties and invariant solutions of a sixth-order thin film equation in viscous fluid
• A new discretization for mth-Laplace equations with arbitrary polynomial degrees
• Instabilities and singularities in Hele–Shaw flow
• Characteristic of solid product layer of MgSO\(_{4}\) in the reaction of MgO with SO\(_{2}\)
• Weak solutions for a sixth-order thin film equation
• Two-level overlapping Schwarz preconditioners with universal coarse spaces for 2mth-order elliptic problems
• The modified lubrication equation
• Sixth-order parabolic equation on an interval: eigenfunction expansion, Green's function, and intermediate asymptotics for a finite thin film with elastic resistance
• Existence and blow-up of weak solutions for a sixth-order equation related to thin solid films
• On a degenerate high-order parabolic equation for the evolution of elastic plates
• Higher order nonlinear degenerate parabolic equations

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