The Isolation Oxidation of Silicon: The Reaction-Controlled Case (Q3826286)
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scientific article; zbMATH DE number 4100842
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | The Isolation Oxidation of Silicon: The Reaction-Controlled Case |
scientific article; zbMATH DE number 4100842 |
Statements
The Isolation Oxidation of Silicon: The Reaction-Controlled Case (English)
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1989
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asymptotic expansions
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two-dimensional isolation oxidation of silicon
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limit of reaction-controlled oxidation
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nondimensional reaction coefficient
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0.8935633301734924
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0.8642542958259583
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0.8281566500663757
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0.8008180856704712
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