Stress-dependent local oxidation of silicon (Q4594900)
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scientific article; zbMATH DE number 6813055
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | Stress-dependent local oxidation of silicon |
scientific article; zbMATH DE number 6813055 |
Statements
Stress-Dependent Local Oxidation of Silicon (English)
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27 November 2017
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silicon oxidation
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stress-dependent reaction coefficient
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matched asymptotic expansions
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0.8859972953796387
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0.8008180856704712
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0.7915825843811035
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0.7855530381202698
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0.7649961709976196
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