Stress-Dependent Local Oxidation of Silicon (Q4594900)

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scientific article; zbMATH DE number 6813055
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Stress-Dependent Local Oxidation of Silicon
scientific article; zbMATH DE number 6813055

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    Stress-Dependent Local Oxidation of Silicon (English)
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    27 November 2017
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    silicon oxidation
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    stress-dependent reaction coefficient
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    matched asymptotic expansions
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