A Hybrid and Intelligent System for Predicting Lot Output Time in a Semiconductor Fabrication Factory
DOI10.1007/11908029_78zbMATH Open1162.68677OpenAlexW1583629825MaRDI QIDQ3535526FDOQ3535526
Authors: Toly Chen, Yucheng Lin 
Publication date: 13 November 2008
Published in: Rough Sets and Current Trends in Computing (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/11908029_78
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