scientific article; zbMATH DE number 1312981

zbMATH Open0926.68141MaRDI QIDQ4254872FDOQ4254872

Authors: Arokia Nathan, Henry Baltes 

Publication date: 1 July 1999

Title of this publication is not available (Why is that?)

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zbMATH Keywords

microtransducer CAD

Mathematics Subject Classification ID

Introductory exposition (textbooks, tutorial papers, etc.) pertaining to computer science (68-01) Computer science aspects of computer-aided design (68U07)

Cited In (5)

• Mikrosystementwurf
• The MEMS handbook
• Development of a geometry-based process planning system for surface micromachining
• Title not available (Why is that?)
• MST MEMS model order reduction: requirements and benchmarks

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