Microtransducer CAD. Physical and computational aspects
The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystem industry. The text begins with an illustrative example to highlight the goals and benefits of microtransducer CAD. Chapter 2 summarizes the model equations describing electrical transport in semiconductor devices and microtransducers in the absence of external fields. Models treating the effects of the external radiant, magnetic, thermal, and mechanical fields on electrical transport are described systematically in Chapters 3 to 6. Chapter 7 presents an abridged version of solid structural and fluid mechanics. Here, we focus only on pertinent model equations and boundary conditions. Model equations and boundary conditions relevant to the various types of mechanical microactuation are discussed in Chapter 8. Chapter 9 concludes with a glimpse into simulation techniques for the mixed-signal microsystem, i.e., microtransducer plus circuitry. Where possible, we have supplemented the model equations with tables and/or graphs of process-dependent material data to enable the CAD engineer to carry out simulations even when reliable material models are not available.
- MST MEMS model order reduction: requirements and benchmarks
- The MEMS handbook
- scientific article; zbMATH DE number 444441 (Why is no real title available?)
- Design of microsystems: Systems-theoretical aspects
- scientific article; zbMATH DE number 703067 (Why is no real title available?)
- Development of a geometry-based process planning system for surface micromachining
- Design of microsystems. Design and simulation of microsystems
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