scientific article; zbMATH DE number 1312981

MaRDI QIDQ4254872zbMATH OpenFDO

Authors Arokia Nathan, Henry Baltes

Publication date 1 July 1999

zbMATH Keywords

microtransducer CAD

Mathematics Subject Classification ID

Introductory exposition (textbooks, tutorial papers, etc.) pertaining to computer science (68-01) Computer science aspects of computer-aided design (68U07)

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(7)

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• Development of a geometry-based process planning system for surface micromachining
• Mikrosystementwurf

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