scientific article; zbMATH DE number 978487

zbMATH Open0865.35134MaRDI QIDQ4332648FDOQ4332648

Authors: Karl-Heinz Hoffmann, Elke Wilczok, Hans-Jörg Bauer 

Publication date: 9 April 1997

Title of this publication is not available (Why is that?)

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zbMATH Keywords

thermal oxidation of silicondopant diffusion in polycrystalline siliconmodels for the diffusion of impurity atoms in silicon

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Free boundary problems for PDEs (35R35)

Cited In (4)

• Simulation of coupled diffusion of impurity atoms and point defects under nonequilibrium conditions in local domain
• Title not available (Why is that?)
• Optimization of temperature of polysilicon rods
• Interacting Dopant Diffusions in Crystalline Silicon

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