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scientific article; zbMATH DE number 978487
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| English | No label defined |
scientific article; zbMATH DE number 978487 |
Statements
9 April 1997
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models for the diffusion of impurity atoms in silicon
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thermal oxidation of silicon
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dopant diffusion in polycrystalline silicon
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0.7700858116149902
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0.7587468028068542
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