Dynamics and Control of Electrostatic Structures
From MaRDI portal
Publication:4339758
DOI10.1115/1.2788876zbMath0886.93046OpenAlexW2125465546MaRDI QIDQ4339758
Leslie L. jun. Weaver, Larry M. Silverberg
Publication date: 21 April 1998
Published in: Journal of Applied Mechanics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1115/1.2788876
Related Items
A multibody-based dynamic simulation method for electrostatic actuators ⋮ MST MEMS model order reduction: requirements and benchmarks