scientific article; zbMATH DE number 1060028

MaRDI QIDQ4354018zbMATH OpenFDO

Authors John S. Baras, Nital S. Patel

Publication date 27 January 1998

zbMATH Keywords

deterministic dynamic gamelarge deviationsemiconductor manufactoring process

Mathematics Subject Classification ID

Discrete-time games (91A50) Application models in control theory (93C95)

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(4)

• Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing
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• Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework
• Noise and Learning in Semiconductor Manufacturing

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