Shape-based optimal estimation and design of curve evolution processes with application to plasma etching

DOI10.1109/9.975470MaRDI QIDQ4540262zbMATH OpenOpenAlexFDO

Authors Nan Zhou, J. M. Berg

Publication date 21 July 2002

Published in IEEE Transactions on Automatic Control (Search for Journal in Brave)

Full work available at URL http://purl.umn.edu/3438

zbMATH Keywords

semiconductor manufacturinglevel set methodsnonlinear partial differential equationgradient computationcurve evolution processplasma etching of thin films

Mathematics Subject Classification ID

Optimization of shapes other than minimal surfaces (49Q10) System identification (93B30) Nonlinear systems in control theory (93C10) Control/observation systems governed by partial differential equations (93C20) Application models in control theory (93C95)

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(2)

• Curve evolution models for real-time identification with application to plasma etching
• Numerical analysis of an inverse problem for the eikonal equation

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