Shape-based optimal estimation and design of curve evolution processes with application to plasma etching

DOI10.1109/9.975470zbMath1021.93009OpenAlexW2115722082MaRDI QIDQ4540262

Nan Zhou, Jordan M. Berg

Publication date: 21 July 2002

Published in: IEEE Transactions on Automatic Control (Search for Journal in Brave)

Full work available at URL: http://purl.umn.edu/3438

zbMATH Keywords

level set methodsnonlinear partial differential equationsemiconductor manufacturinggradient computationcurve evolution processplasma etching of thin films

Mathematics Subject Classification ID

Control/observation systems governed by partial differential equations (93C20) System identification (93B30) Nonlinear systems in control theory (93C10) Application models in control theory (93C95) Optimization of shapes other than minimal surfaces (49Q10)

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