Study of the mathematical model for a microelectromechanical resonator of the pPlatform type

MaRDI QIDQ4594423zbMATH OpenFDO

Authors S. I. Fadeev, Eduard Gennadevich Kostsov, Daniil Olegovich Pimanov

Publication date 23 November 2017

Full work available at URL http://www.ict.nsc.ru/jct/annotation/1722?l=eng

zbMATH Keywords

auto-oscillations and natural oscillationscylindrical flexure of elastic beamelectrostatical attractionFourier methodGreen's functionsmethod of linesnatural frequency

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Micromechanics of solids (74M25) Electro- and magnetostatics (78A30)

Recommendations

• Numerical study of mathematical models of microelectromechanical resonators of various types
• On the functioning of a VHF microelectromechanical resonator
• Dynamic analysis of multilayers based MEMS resonators
• Dynamic analysis of a micro-resonator driven by electrostatic combs
• Numerical study of mathematical models of micromechanics with periodic impulse action

Cited in

(7)

• Numerical study of mathematical models of microelectromechanical resonators of various types
• Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators
• scientific article; zbMATH DE number 5638002 (Why is no real title available?)
• Numerical study of nonlinear oscillations in a clock frequency MEMS-generator
• On the functioning of a VHF microelectromechanical resonator
• Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials
• Nonlinear dynamical analysis of some microelectromechanical resonators with internal damping

This page was built for publication: Study of the mathematical model for a microelectromechanical resonator of the pPlatform type

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4594423)