On the functioning of a VHF microelectromechanical resonator

MaRDI QIDQ5502018zbMATH OpenFDO

Authors Eduard Gennadevich Kostsov, S. I. Fadeev

Publication date 14 August 2015

Full work available at URL http://mathnet.ru/eng/sjim806

zbMATH Keywords

phase portraitauto-oscillationmicroresonatorelectrostatic attractionfrequency generatorrigidity of a springVHF MEMS

Mathematics Subject Classification ID

Electro- and magnetostatics (78A30)

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(4)

• Phase switch in the stochastic response of a micromechanical beam resonator
• Study of the mathematical model for a microelectromechanical resonator of the pPlatform type
• Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials
• Numerical study of mathematical models of microelectromechanical resonators of various types

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