On the functioning of a VHF microelectromechanical resonator

zbMATH Open1340.78004MaRDI QIDQ5502018FDOQ5502018

Authors: Eduard Gennadevich Kostsov, S. I. Fadeev 

Publication date: 14 August 2015

Full work available at URL: http://mathnet.ru/eng/sjim806

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zbMATH Keywords

phase portraitauto-oscillationmicroresonatorelectrostatic attractionfrequency generatorrigidity of a springVHF MEMS

Mathematics Subject Classification ID

Electro- and magnetostatics (78A30)

Cited In (2)

• Numerical study of mathematical models of microelectromechanical resonators of various types
• Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials

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