Tailoring the oxygen distribution in 300 mm Czochralski crystal of pure silicon using cusp magnetic field

DOI10.1504/PCFD.2010.035364zbMATH Open1427.76009MaRDI QIDQ614232FDOQ614232

Authors P. R. Gunjal, P. A. Ramachandran

Publication date 27 December 2010

Published in Progress in Computational Fluid Dynamics (Search for Journal in Brave)

zbMATH Keywords

magnetohydrodynamicscrystal growthrotational flowCzochralskipure siliconthermo fluids

Mathematics Subject Classification ID

Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) General theory of rotating fluids (76U05) Magnetohydrodynamics and electrohydrodynamics (76W05) Proceedings, conferences, collections, etc. pertaining to fluid mechanics (76-06)

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Cited in

(2)

• Effect of high frequency magnetic field on CZ silicon melt convection
• Global simulation of a silicon Czochralski furnace in an axial magnetic field.

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