Implementation and evaluation of the level set method: towards efficient and accurate simulation of wet etching for microengineering applications

DOI10.1016/J.CPC.2013.05.016MaRDI QIDQ6556352FDOQ6556352

Authors: C. Montoliu, Néstor Ferrando, M. A. Gosálvez, J. Cerdá, R. J. Colom 

Publication date: 17 June 2024

Published in: Computer Physics Communications (Search for Journal in Brave)

zbMATH Keywords

cellular automatalevel set methodMEMSparallel computingGPUsparse field methodanisotropic wet chemical etchingmicroengineering

Mathematics Subject Classification ID

Fluid mechanics (76-XX) Computer science (68-XX)

Cites Work

• Fronts propagating with curvature-dependent speed: Algorithms based on Hamilton-Jacobi formulations
• Efficient implementation of essentially nonoscillatory shock-capturing schemes. II
• A fast level set method for propagating interfaces
• Two Approximations of Solutions of Hamilton-Jacobi Equations
• Level set method for two-phase incompressible flows under magnetic fields
• Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces
• A level set approach to a unified model for etching, deposition, and lithography. III: Redeposition, reemission, surface diffusion, and complex simulations
• A level set approach to a unified model for etching, deposition, and lithography. I: Algorithms and two-dimensional simulations
• A level set approach to a unified model for etching, deposition, and lithography. II: Three-dimensional simulations
• Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations
• Über die partiellen Differenzengleichungen der mathematischen Physik.

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