Implementation and evaluation of the level set method: towards efficient and accurate simulation of wet etching for microengineering applications (Q6556352)
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scientific article; zbMATH DE number 7866093
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| English | Implementation and evaluation of the level set method: towards efficient and accurate simulation of wet etching for microengineering applications |
scientific article; zbMATH DE number 7866093 |
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Implementation and evaluation of the level set method: towards efficient and accurate simulation of wet etching for microengineering applications (English)
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17 June 2024
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level set method
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sparse field method
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anisotropic wet chemical etching
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microengineering
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cellular automata
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MEMS
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parallel computing
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GPU
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