Investigation of Ge and C layer deposition on a Si substrate using SIMS profiling
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Publication:662803
DOI10.3103/S1062873810020292zbMath1233.82029OpenAlexW1982904372MaRDI QIDQ662803
Yu. V. Trushin, J. Pezoldt, Th. Stauden, V. S. Kharlamov, P. Mazri, P. Nader, D. V. Kulikov
Publication date: 24 February 2012
Published in: Bulletin of the Russian Academy of Sciences: Physics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.3103/s1062873810020292
Statistical mechanics of semiconductors (82D37) Interface problems; diffusion-limited aggregation in time-dependent statistical mechanics (82C24)
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