Investigation of static and dynamic characteristics of a piezomotor for nano-and micrometric movements
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Publication:734241
DOI10.1134/S1064230708050110zbMATH Open1173.93367OpenAlexW2018671450MaRDI QIDQ734241FDOQ734241
Authors: S. M. Afonin 
Publication date: 20 October 2009
Published in: Journal of Computer and Systems Sciences International (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1134/s1064230708050110
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nano- and micrometric movementsnanotechnology and microelectronics equipmentstatic and dynamic characteristics of a piezomotor
Cites Work
- A generalized structural-parametric model of an electromagnetoelastic converter for nano- and micrometric movement control systems. III. Transformation of parametric structural circuits of an electromagnetoelastic converter for nano- and micrometric movement control systems
- Generalized structural parametric model of an electromagnetoelastic transducer for control systems of nano- and microdisplacements. II: On the generalized structural parametric model of a compound electromagnetoelastic transducer
- Solution of the wave equation for the control of an electromagnetoelastic transducer
Cited In (12)
- DESIGN OPTIMIZATION OF AN ELECTROSTATIC MICROMOTOR WITH AXIAL FIELD
- Multidimensional structural parametric model and block diagram of multilayer electro-magneto-elastic actuator of nano and micro displacements
- Adaptive time-optimal control of a robotic manipulator
- Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements
- Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control
- Hysteresis characteristics of piezotransducer for nano- and micrometric movements and their harmonic linearization
- Dynamic substructure model for multiple impact responses of micro/nano piezoelectric precision drive system
- Generalized structural-parametric model of an electromagnetoelastic converter for control systems of nano-and micrometric movements: IV. Investigation and calculation of characteristics of step-piezodrive of nano-and micrometric movements
- Physical characteristics of the sensing elements of feedback sensors combined with thermomechanical actuators for plant micromotion control systems
- Block diagrams of a multilayer piezoelectric motor for nano- and microdisplacements based on the longitudinal piezoelectric effect
- Block diagrams of a multilayer piezoelectric motor for nano- and microdisplacements based on the transverse piezoeffect
- A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation
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