Investigation of static and dynamic characteristics of a piezomotor for nano-and micrometric movements

DOI10.1134/S1064230708050110MaRDI QIDQ734241zbMATH OpenOpenAlexFDO

Authors S. M. Afonin

Publication date 20 October 2009

Published in Journal of Computer and Systems Sciences International (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1134/s1064230708050110

zbMATH Keywords

nano- and micrometric movementsnanotechnology and microelectronics equipmentstatic and dynamic characteristics of a piezomotor

Mathematics Subject Classification ID

Application models in control theory (93C95)

Recommendations

• Generalized structural-parametric model of an electromagnetoelastic converter for control systems of nano-and micrometric movements: IV. Investigation and calculation of characteristics of step-piezodrive of nano-and micrometric movements
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Cites work

• A generalized structural-parametric model of an electromagnetoelastic converter for nano- and micrometric movement control systems. III. Transformation of parametric structural circuits of an electromagnetoelastic converter for nano- and micrometric movem
• Generalized structural parametric model of an electromagnetoelastic transducer for control systems of nano- and microdisplacements. II: On the generalized structural parametric model of a compound electromagnetoelastic transducer
• Solution of the wave equation for the control of an electromagnetoelastic transducer

Cited in

(12)

• A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation
• DESIGN OPTIMIZATION OF AN ELECTROSTATIC MICROMOTOR WITH AXIAL FIELD
• Multidimensional structural parametric model and block diagram of multilayer electro-magneto-elastic actuator of nano and micro displacements
• Adaptive time-optimal control of a robotic manipulator
• Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements
• Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control
• Hysteresis characteristics of piezotransducer for nano- and micrometric movements and their harmonic linearization
• Dynamic substructure model for multiple impact responses of micro/nano piezoelectric precision drive system
• Generalized structural-parametric model of an electromagnetoelastic converter for control systems of nano-and micrometric movements: IV. Investigation and calculation of characteristics of step-piezodrive of nano-and micrometric movements
• Physical characteristics of the sensing elements of feedback sensors combined with thermomechanical actuators for plant micromotion control systems
• Block diagrams of a multilayer piezoelectric motor for nano- and microdisplacements based on the longitudinal piezoelectric effect
• Block diagrams of a multilayer piezoelectric motor for nano- and microdisplacements based on the transverse piezoeffect

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