Input-shaping control of nonlinear MEMS

DOI10.1007/S11071-007-9246-XzbMATH Open1178.74121OpenAlexW2051181139MaRDI QIDQ840458FDOQ840458

Authors: N. E. Zubov 

Publication date: 11 September 2009

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11071-007-9246-x

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zbMATH Keywords

MEMSreduced-order modelinginput-shaping controltorsional micromirror

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Control, switches and devices (``smart materials) in solid mechanics (74M05)

Cites Work

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Cited In (4)

• A general modelling and control framework for electrostatically actuated mechanical systems
• Simulations and experimental investigations on residual vibration suppression of electromagnetically actuated structures using command shaping methods
• Tracking and robustness analysis for controlled microelectromechanical relays
• Distributed fixed-time control under directed graph using input shaping

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