Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth

DOI10.1016/J.NONRWA.2009.02.028zbMATH Open1192.35140OpenAlexW2009437480MaRDI QIDQ974546FDOQ974546

E. L. Pankratov

Publication date: 3 June 2010

Published in: Nonlinear Analysis. Real World Applications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.nonrwa.2009.02.028

zbMATH Keywords

alternative approach of modelingdelta-dopingepitaxial growth of heterostructure

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Liquid crystals (76A15) Statistical mechanics of crystals (82D25) Statistical mechanics of semiconductors (82D37)

Cites Work

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