Development of a new simulation model of spin coating process and its application to optimize the 450 mm wafer coating process
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Publication:974890
DOI10.1016/j.ijheatmasstransfer.2010.01.018zbMath1305.76012OpenAlexW2004666264MaRDI QIDQ974890
Junemo Koo, Jung-Yeul Jung, Yong-Tae Kang
Publication date: 8 June 2010
Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijheatmasstransfer.2010.01.018
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