A three‐dimensional numerical method for thermal analysis in X‐ray lithography (Q4700816)
From MaRDI portal
scientific article; zbMATH DE number 1358252
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A three‐dimensional numerical method for thermal analysis in X‐ray lithography |
scientific article; zbMATH DE number 1358252 |
Statements
A three‐dimensional numerical method for thermal analysis in X‐ray lithography (English)
0 references
9 May 2000
0 references
finite difference method
0 references
microfabrication
0 references
multilayers
0 references
photoresist
0 references
preconditioned Richardson method
0 references
Poisson equation
0 references
domain decomposition algorithm
0 references
