A three‐dimensional numerical method for thermal analysis in X‐ray lithography
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Publication:4700816
DOI10.1108/09615539810213188zbMath0935.78017MaRDI QIDQ4700816
Publication date: 9 May 2000
Published in: International Journal of Numerical Methods for Heat & Fluid Flow (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1108/09615539810213188
finite difference method; Poisson equation; multilayers; photoresist; domain decomposition algorithm; preconditioned Richardson method; microfabrication
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