A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography
DOI10.1108/09615539910276160zbMath0953.80002MaRDI QIDQ4952969
Publication date: 29 January 2001
Published in: International Journal of Numerical Methods for Heat & Fluid Flow (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1108/09615539910276160
temperature profile; thin layers; block tridiagonal linear systems; parallel Gaussian elimination; three-dimensional parabolic equations; domain decomposition algorithm; three-dimensional numerical method; \(X\)-ray irradiation process; \(X\)-ray lithography; hybrid finite element-finite difference scheme
78A55: Technical applications of optics and electromagnetic theory
80A99: Thermodynamics and heat transfer
80M20: Finite difference methods applied to problems in thermodynamics and heat transfer
80M10: Finite element, Galerkin and related methods applied to problems in thermodynamics and heat transfer
