A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography (Q4952969)
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scientific article; zbMATH DE number 1443361
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| English | A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography |
scientific article; zbMATH DE number 1443361 |
Statements
A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography (English)
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29 January 2001
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\(X\)-ray lithography
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three-dimensional numerical method
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temperature profile
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\(X\)-ray irradiation process
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hybrid finite element-finite difference scheme
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three-dimensional parabolic equations
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thin layers
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domain decomposition algorithm
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parallel Gaussian elimination
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block tridiagonal linear systems
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0.8711618781089783
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0.6783138513565063
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0.6571587920188904
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