A three‐dimensional numerical method for thermal analysis in X‐ray lithography (Q4700816)
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scientific article; zbMATH DE number 1358252
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | A three‐dimensional numerical method for thermal analysis in X‐ray lithography |
scientific article; zbMATH DE number 1358252 |
Statements
A three‐dimensional numerical method for thermal analysis in X‐ray lithography (English)
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9 May 2000
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finite difference method
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microfabrication
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multilayers
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photoresist
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preconditioned Richardson method
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Poisson equation
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domain decomposition algorithm
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0.90417343
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0.83623815
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0.8323819
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0.83227307
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0.8270533
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0.8238534
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0.8187681
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