Technology and Device Modeling in Micro and Nano-electronics: Current and Future Challenges

DOI10.1007/978-3-540-71980-9_3MaRDI QIDQ5432103zbMATH OpenOpenAlexFDO

Authors Andrea Marmiroli, Gianpietro Carnevale, Andrea Ghetti

Publication date 2 January 2008

Published in Scientific Computing in Electrical Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/978-3-540-71980-9_3

zbMATH Keywords

Boltzmann equationcoupled physical effectsmicro-electronicsnano-electronicsPoisson equationSchrödinger equationsilicon oxidation

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Diffusion (76R50) Electromagnetic theory (general) (78A25) Diffraction, scattering (78A45) General topics in optics and electromagnetic theory (78A99)

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Cited in

(4)

• Towards integrated nanoelectronic and photonic devices
• From microelectronics to nanoelectronics: mathematical challenges
• The predictive technology model in the late silicon era and beyond
• Preface

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