Vibration analysis of pre-stressed pressure sensors using finite element method

DOI10.1016/S0168-874X(98)00013-4MaRDI QIDQ1274902zbMATH OpenOpenAlexFDO

Authors Wanmin Han, W. L. Cleghorn

Publication date 12 January 1999

Published in Finite Elements in Analysis and Design (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/s0168-874x(98)00013-4

zbMATH Keywords

pre-stressed string-plate sensorpre-stretched stringthin circular plate

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Finite element methods applied to problems in solid mechanics (74S05)

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Cited in

(3)

• Finite element analysis of silicon condenser microphones with corrugated diaphragms
• Theory of vibrating diaphragm-type pressure sensor
• Numerical Analysis and Its Applications

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