Design framework for high-performance optimal sampled-data control with application to a wafer stage (Q5758317): Difference between revisions

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Latest revision as of 13:36, 26 June 2024

scientific article; zbMATH DE number 5186149
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English
Design framework for high-performance optimal sampled-data control with application to a wafer stage
scientific article; zbMATH DE number 5186149

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    Design framework for high-performance optimal sampled-data control with application to a wafer stage (English)
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    3 September 2007
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    control design
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    high-performance sampled-data systems
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    system identification techniques
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