Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298)

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Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method
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    Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (English)
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    11 March 2016
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    wave scattering
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    diffraction
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    integral equations
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    mathematical modeling
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    nanostructures
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