Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (Q331291)

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Nonlinear analysis of electrostatically actuated diaphragm-type micropumps
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    Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (English)
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    26 October 2016
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    micropump
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    electrostatic actuation
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    circular diaphragm
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    nonlinear analysis
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