Nonlinear analysis of electrostatically actuated diaphragm-type micropumps

DOI10.1007/S11071-015-2379-4zbMath1349.76045OpenAlexW2135422431WikidataQ58483173 ScholiaQ58483173MaRDI QIDQ331291

Ghader Rezazadeh, Rasoul Shabani, Mehrdad Sheikhlou

Publication date: 26 October 2016

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11071-015-2379-4

zbMATH Keywords

nonlinear analysismicropumpcircular diaphragmelectrostatic actuation

Mathematics Subject Classification ID

Incompressible inviscid fluids (76B99) Multiple scale methods for ordinary differential equations (34E13)

Related Items (1)

Surface energy and thermal stress effect on nonlinear vibration of electrostatically actuated circular micro-/nanoplates based on modified couple stress theory

Cites Work

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• Dynamic pull-in phenomenon in MEMS resonators
• Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in
• A study of the nonlinear response of a resonant microbeam to an electric actuation
• Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis
• Coupled vibration of a cantilever micro-beam submerged in a bounded incompressible fluid domain

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