The effect of the small-aspect-ratio approximation on canonical electrostatic MEMS models
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Publication:2501099
DOI10.1007/s10665-005-9013-2zbMath1107.78009OpenAlexW2097950540MaRDI QIDQ2501099
Tobin A. Driscoll, John A. Pelesko
Publication date: 4 September 2006
Published in: Journal of Engineering Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10665-005-9013-2
continuation methodnonlinear elliptic problemmicroelectromechanical systemsMEMSNEMSnanoelectromechanical systems
Technical applications of optics and electromagnetic theory (78A55) Asymptotic analysis in optics and electromagnetic theory (78M35)
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