Modeling and performance evaluation of a flexure-based \(XY\) parallel micromanipulator (Q1048906)

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Modeling and performance evaluation of a flexure-based \(XY\) parallel micromanipulator
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    Modeling and performance evaluation of a flexure-based \(XY\) parallel micromanipulator (English)
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    8 January 2010
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    micro-positioning stages
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    parallel mechanisms
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    flexure hinges
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    lumped model
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    nonlinear modeling
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    finite element analysis
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