Modeling and performance evaluation of a flexure-based \(XY\) parallel micromanipulator (Q1048906)
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English | Modeling and performance evaluation of a flexure-based \(XY\) parallel micromanipulator |
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Modeling and performance evaluation of a flexure-based \(XY\) parallel micromanipulator (English)
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8 January 2010
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micro-positioning stages
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parallel mechanisms
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flexure hinges
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lumped model
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nonlinear modeling
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finite element analysis
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