Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems (Q1753643)
From MaRDI portal
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems |
scientific article |
Statements
Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems (English)
0 references
29 May 2018
0 references
production
0 references
queueing
0 references
robust production capacity planning
0 references
semiconductor manufacturing
0 references
bi-objective optimization
0 references
0 references
0 references
0 references
0 references
0 references
0 references