Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems (Q1753643)
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scientific article; zbMATH DE number 6875912
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| English | Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems |
scientific article; zbMATH DE number 6875912 |
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Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems (English)
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29 May 2018
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production
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queueing
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robust production capacity planning
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semiconductor manufacturing
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bi-objective optimization
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